Synthesis mechanism of SiC-SiO2 core/shell nanowires grown by chemical vapor deposition

被引:0
|
作者
Finetti, F. [1 ]
Cavalli, E. [1 ]
Attolini, G. [2 ]
Rossi, F. [2 ]
机构
[1] Univ Parma, Dept Chem Sci Life & Environm Sustainabil, Viale Sci 17-A, I-43124 Parma, Italy
[2] IMEM CNR Inst Mat Elect & Magnetism, Parco Area Sci 37-A, I-43124 Parma, Italy
来源
NANO EXPRESS | 2020年 / 1卷 / 02期
关键词
nanowires; silicon carbide; carbon monoxide; iron disilicide; vapor-liquid-solid (VLS); RAMAN-SCATTERING; FE;
D O I
10.1088/2632-959X/abb47a
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Core-shell SiC-SiO2 nanowires were grown on silicon substrate with the chemical vapor deposition method using iron nitrate as promoter for the growth and CO as a carbon precursor, under atmospheric pressure and at a temperature of 1100 degrees C. The whole process involves two main stages: promoter conditioning (dewetting) and growth, by reaction with CO. The dewetting phase has been characterized by SEM and TEM techniques, x-ray diffraction and Raman spectroscopy. The results show that at the operating temperature, a solid-state reaction between the substrate and the promoter takes place with the formation of alpha-FeSi2. The growth of the nanowires begins after an induction time of about 5 min from the introduction of CO. The experimental data have been interpreted by considering a nucleation process involving a reaction between FeSi2 and CO. For the nanowires growth phase, a mechanism based on the Vapor-Liquid-Solid theory is proposed, compatible with the morphology of the drop-shaped particles present on the tip of the nanowires.
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页数:7
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