Special Features of the Synthesis of Epitaxial Layers of (SiC)1 - x(AlN)x Solid Solutions.

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作者
Nurmagomedov, Sh.A.
Safaraliev, G.K.
Sorokin, N.D.
Tairov, Yu.M.
Tsvetkov, V.F.
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Neorganiceskie materialy | 1986年 / 22卷 / 10期
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11
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页码:1672 / 1674
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