Control of the magnetic film composition and uniformity in magnetron sputtering

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作者：
Zhu, Yaomin
Li, Xiaoyuan
Song, Xiaoping
Chen, Qiang
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Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering | 2004年 / 33卷 / 07期
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页码：775 / 777
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