INTERFACE AND MONO-MOLECULAR FILM SOLID-STATE REACTIONS - APPLICATION TO MICROLITHOGRAPHY

被引：0

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作者：

BARRAUD, A

机构：

[1] CEA,F-07750 PARIS,FRANCE

[2] CENS,SERV ELECTR SACLAY,F-91190 GIF SUR YVETTE,FRANCE

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1980年 / 127卷 / 03期

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D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

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页码：C107 / C107

页数：1

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